A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

Device structure and characterization

The mechanical configuration of the mode-localized tilt sensor comprises a proof mass supported by four suspensions, a pair of differential microlever force amplifiers, two identical clamped-clamped (C–C) resonators connected by a mechanical microlever coupling structure, and a virtual electrostatic tuning structure, as shown in Fig. 1a, b^25,26. The dimensions of the mode-localized tilt sensor are provided in Supplementary Materials Table I. Upon the occurrence of a tilt variation, the proof mass exerts an inertial force, which is subsequently…