Optimization of X-axis servo drive performance using PSO fuzzy control technique for double-axis dicing saw

Extracting basic data for ADT-8230

In the process of processing semiconductor chips, dicing error in the micron range is necessary. X-axis is a long-stroke axis, and it carries different speeds for different materials. It brings vibration and response speed, and the size of the speed control range directly affects the dicing quality and processing efficiency. Therefore, in order to ensure the high-speed stability of the linear axis of the machine tool, the servo system is required to have a fast response, a large speed range and a small position tracking error.

The X-axis servo drive and…